The road to localization of MOCVD is difficult to break through in the short term

China's MOCVD increase in 2011 is expected to be the largest global giant to dominate the supply of MOCVD equipment. In 2010, the number of new installations of MOCVD worldwide was the largest in South Korea, followed by Taiwan. According to the statistics of SEMI (International Semiconductor Equipment and Materials Association), the newly added MOCVD in China this year is between 160-180, ranking third in the world. In addition, according to SEMI statistics and analysis, combined with the supply of MOCVD, the new MOCVD share in 2011 is expected to reach 40% of the global, while the increase in other regions will remain at or equivalent to the level of 2010.

MOCVD is the key device for the growth of epitaxial wafers as the core part of the LED, and it is also the single largest investment in the manufacturing process. Currently, there are only a limited number of manufacturers who can provide industrialized production of MOCVD equipment, with a high degree of concentration, mainly in Europe, America and Japan. Driven by the development of the global LED industry, MOCVD has been in tight supply in recent years, and the arrival time of equipment has been continuously extended. The suppliers of MOCVD in China are mainly concentrated in two companies, Veeco in USA and AIXTRON in Germany.

The road to localization of MOCVD equipment that is not smooth is difficult to break through in the short term. The road to localization of MOCVD equipment in China has not gone smoothly. It can only produce small-scale MOCVD equipment for scientific research. Currently, it is not yet available for mature industrial production. MOCVD equipment manufacturers, but recently there are several domestic equipment research and production units have given the timetable for localization of equipment.

According to AIXTRON insiders, AIXTRON expects revenue for 2011 will reach 450 million euros (about 4.043 billion yuan), of which the Chinese market will account for 40% of its total revenue, which is 180 million euros (about 1.617 billion yuan) .

In the face of such tantalizing data, it is not difficult to explain Tianlong Optoelectronics' major action on the LED epitaxial device MOCVD. In addition to Tianlong Optoelectronics, in recent years, more than a dozen companies or institutions in China have developed multiple MOCVD prototypes, such as the Semiconductor Institute of the Chinese Academy of Sciences, Zhaoxin Group and Huazhong University of Science and Technology, Qingdao Jiesheng Optoelectronics and Xidian University. But at the end of the day, they all failed. Most of them failed to launch prototypes. In January 2010, the Zhaoxin Group's MOCVD prototype went down on the production line, but it ended up disappearing.

Professor Fang Zhilie of Fudan University stated that the production of MOCVD equipment is not a simple matter, otherwise the current market will not be monopolized by only AIXTRON and Veeco.

AIXTRON insiders said that these companies that produce MOCVD equipment will not be competitors.

MOCVD development challenges more speculation more cooperation and investment in LED epitaxial process is very difficult, the epitaxial film quality, process uniformity, process repeatability of the strict requirements of the epitaxial process development, MOCVD equipment development presents a huge challenge, the reaction chamber air flow The field design involves a number of key technologies such as chamber design, air intake system design, process module design, substrate rotation system design, and vacuum system design. The technical difficulty is very high, and the high-uniformity, high-precision heating control at high temperatures, at the same time, The different temperature process steps are performed in the same chamber, and the process temperature is frequently switched. All these pose great challenges to the design of the heating system. The precision control requirements are high, and the multi-step process is frequently switched in a single chamber, and the hardware reliability of the system is improved. The requirements are very high. At the same time, LED epitaxial process development costs huge amounts of money.

If a technician 忽悠 the boss, the boss 忽悠 the government, this is irresponsible behavior. The person in charge of the well-known domestic epitaxial wafer manufacturers bluntly said, "I am not optimistic about this project. I will only treat such news as a joke. To take project funds and the like, many people are using this concept to deceive resources. It's very difficult to really make MOCVD. In the past two years, we can't do it at home, at least until 2013."

Although the industry's views on domestic MOCVD are not the same, if a listed company like Tianlong Optoelectronics can develop MOCVD equipment suitable for the market according to the schedule, it is undoubtedly a boon to the Chinese LED industry. As Shen Weiguang, Vice President of Averyn Optoelectronics stated, “From the perspective of the company, we hope that there will be new competitors for MOCVD equipment, and that better products will come out, which can reduce the cost of the entire industry chain and enter into general Lighting is more mature. As long as it is a good product, we will certainly support and welcome it."

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