Domestic chips enter the fast lane

The foundation of a huge information society is a small integrated circuit, often referred to as a "chip." Don't look at the chips "small size", they "feed" modern industry, mobile phones, computers, home appliances, high-speed rail, electric cars, robots, medical instruments, etc. leaving them simply can not run. "The chip is strong and the industry is strong, and the chip is booming. There is no security without the chip." Chen Chuanhong, director of the major special office of the Ministry of Science and Technology, said that the chip (integrated circuit) manufacturing technology is the world's highest level of micro-processing technology and is the global high-tech national power. The strategy of competition must compete for the commanding heights. In 2008, China launched the National Science and Technology Major Project (referred to as the special equipment for special equipment) of “very large-scale integrated circuit manufacturing equipment and complete sets of technology”. In the past 9 years, the high-end manufacturing equipment and materials of integrated circuits have filled the gap of the industrial chain from scratch, the manufacturing process and package integration have moved from weak to strong and the world has participated in international competition. The integrated circuit industry has entered the fast lane of independent innovation and development. Since the implementation of key equipments from scratch-free integrated circuit equipment, China's integrated circuit manufacturing technology and industry have achieved tremendous changes from scratch, from weak to strong. "When integrated circuit technology advances, the size is reduced by three-thirds. First, the overall integration level is increased by 4 times.” Ye Tianchun, chief of integrated circuit equipment technology and director of the Institute of Microelectronics of the Chinese Academy of Sciences, said: “With 28 nanometer technology as an example, the integration is equivalent to the size of the fingernail. More than one billion transistors, each of which is equivalent to one-thousandth of a thousand human hair. More advanced 14-nanometer technology is equivalent to more than 500,000 transistors on the human hair wire cross section. Each wire is equivalent to one-fifth of the human hair. "This fine operation is comparable to dancing on the needle tip. It is a great test for equipment, materials, and crafts. Because of the high-tech content, manufacturing integrated circuits. The price of the equipment is 10 to 100 times the price of the general equipment. For a long time, China has long been subject to human beings in the high-end equipment of integrated circuits. Because there are no domestically developed R&D IC equipment with process nodes up to 90 nm and 65 nm, only foreign equipment can be used. Western developed countries have been strictly reviewing and restricting integrated circuit manufacturing equipment and materials and process technology exported to China. This has seriously restricted the development of China's integrated circuit industry, and the problem has become increasingly prominent. At the same time, with the rapid development of China's national economy, especially the acceleration of information technology, the demand for integrated circuit products continues to grow rapidly. Since 2006, integrated circuit products have surpassed petroleum to become the largest imported products in China, and since 2013 The annual import volume exceeds 200 billion US dollars. It is extremely urgent to realize the independent innovation and development in the field of integrated circuits. Since the implementation of integrated circuit equipment in 2008, more than 200 enterprises and institutions and more than 20,000 scientific researchers have participated in technical research, mainly in six key industrial clusters such as Beijing, Shanghai, Jiangsu, Shenyang, Shenzhen and Wuhan. After the hard work of the majority of scientific research personnel, China's integrated circuit manufacturing technology and industry have achieved tremendous changes from scratch and from weak to strong. "We have our own key equipment such as etching machine, and apply it in large quantities on a large production line; the integrated circuit technology level has been upgraded for 5 generations, and the 55/40/28 nm three-generation process has completed research and development to achieve mass production, and 20-14 nm process development. A breakthrough was made; the results of the post-package integration technology were fully mass-produced, leading the industry's technical level from the low end to the high end, achieving synchronization with the world." Ye Tianchun told reporters. These self-developed equipments are not only sold to the domestic market, but also gradually enter the overseas market. For example, the medium etching equipment developed by Zhongwei Semiconductor Equipment (Shanghai) Co., Ltd. not only supports the development of domestic chip manufacturing enterprises from 65 nanometers to 28 nanometers, but also the world's most advanced equipment in the international market. Manufacturer competition. At present, China Micro's more than 460 medium etching reactors have produced more than 40 million wafers in high quality and stable production on 27 production lines at home and abroad; 5 nanometer etching is being developed and approved on TSMC's R&D line. . Integrated circuits are the industry with the highest purity of applied materials in all industries. “We have developed hundreds of key materials such as polishing agents and sputtering targets, and entered the mass sales through large production line assessment. These results basically cover the entire industrial chain system of China's integrated circuits, and reversed the passive introduction of the previous process technology. The situation has laid a solid foundation for the independent and healthy development of China's integrated circuit industry." Ye Tianchun said. Establishing a new mode of collaborative development, integrated circuit equipment, through the market mechanism, opened up the connection channel between science and technology and economy, and established a new mode of effective coordination between science and technology, industry, finance and regional economy. "The integrated circuit equipment project has achieved a series of technical achievements, but more important. The result is that the special project has promoted the construction of a new national system under the market economy through active exploration. Zhang Boxu, head of the Special Implementation Management Office and director of the Beijing Economic and Information Commission. Zhang Boxu's new system is to open up the connection between science and technology and the economy through market mechanism, and promote the establishment of a new model of enterprise-based, university and research institutes, and technology, industry, finance and regional economy. The special equipment for integrated circuits was led and implemented by two local governments in Beijing and Shanghai. This is also the only major project organized and implemented by local governments. It is an innovative attempt of the implementation mode of major science and technology organizations in China. In the past 9 years, the Beijing Municipal Government, the Shanghai Municipal Government and the Central Ministries have jointly strengthened special strategic research and top-level design, coordinated the layout in key areas, guided local governments to invest in factor resources, promoted regional industrial agglomeration development, adjustment and upgrading, and formed technological innovation and A new situation in the coordinated development of regional economic integration. Zhang Boxu told reporters that in order to better solve the problem of productization of scientific and technological achievements, the special equipment for integrated circuits has taken the lead in proposing a user assessment mechanism of “application assessment technology, machine evaluation components, downstream assessment upstream, market assessment products”. Through the user and market assessment and verification, the special results are guaranteed to be products that have been tested by the strict market and users and can be applied. The problems of the scientific and technological results inspection standards and verification mechanisms are solved, so that the specially developed equipment, materials, parts and components The process achieves a difficult leap from technological innovation to the transformation of results. It is understood that the sales results of special results totaled 180 billion yuan. The close integration of production, study and research is also a highlight in the special implementation of integrated circuit equipment. Through the establishment of industrial technology innovation alliances such as lithography equipment and packaging and testing, the upstream and downstream enterprises, related research institutions and institutions of higher learning, such as manufacturing processes, equipment, related parts and materials, and more than 200 units in the industrial chain will jointly carry out production, study and research. Use collaborative research. SMIC is the largest and most technologically advanced integrated circuit foundry company in China. Through a special overall layout, SMIC has provided 65-45-28 nanometer product development support for more than 20 design units. In 2016, domestic design company's marketing revenue accounted for nearly 50% of SMIC's total marketing revenue. With the improvement of the independent innovation system and the substantial improvement of the collaborative innovation capability of the industrial chain, the integrated circuit equipment will actively guide local and social industrial investment to follow up, help enterprises to become bigger and stronger, promote the industrialization of results, and form an industrial scale and improve Overall industrial strength. The application of results has boosted the industry. Through the use of integrated circuit equipment technology, the localization rate of equipment in the field of semi-semiconductor manufacturing has been greatly improved. The scale of LED lighting and photovoltaic industry has leapt to the world's first integrated circuit manufacturing equipment industry as a basic industry. The driving surface is very wide. Through the use of integrated circuit equipment technology, the localization rate of equipment in the field of pan-semiconductor manufacturing such as LED lighting, sensors, and photovoltaics has been greatly improved. In particular, LED lighting, photovoltaic and other fields have achieved the localization of key equipment sets, and domestic equipment has become the mainstream of the market. Ye Tianchun told reporters that according to incomplete statistics, domestic equipment has sold 6,590 units in the pan-semiconductor industry. The localization of these equipments has significantly reduced the investment cost in China's LED and photovoltaic fields, and continued to promote the overall competitiveness of China's related industries. The scale of LED lighting and photovoltaics has leapt to the top in the world, and the technology level has also achieved international leadership. According to the relevant person in charge of North Huachuang Technology Group Co., Ltd., the company has become an international mainstream supplier of pan-semiconductor equipment such as LED and photovoltaic through the expansion of integrated circuit equipment. In recent years, it has greatly improved its cooperation with local parts companies. The cost performance of domestically produced equipment has completely replaced imported products in the fields of LED and photovoltaics, which not only increased customer benefits, but also brought billions of sales revenue to the company. The related equipment was exported to the United States, India and other countries. China is the world's largest semiconductor market and the world's largest electronics information product manufacturing base. Ye Tianchun said that in 2020, the special equipment for integrated circuits will focus on the needs of traditional industrial upgrading and the development of strategic emerging industries, promote the scale application of innovation results, and support Chinese enterprises to establish core competitiveness in the global industrial chain. The industry develops independently and forms a characteristic advantage.